The major problem in Cu CMP is dishing, serious dishing will cause the procduct yield loss.
铜化学机械抛光是近些年发展最快的一种工艺,铜碟形是铜化学机械抛光工艺中的主要问题之一。
The sur-face defects such as dishing, erosion can reduce the thickness of copper interconnection and en-large electrical resistance, reduce both the performance and the reliability of device, further influ-ence WIWUN which cause imprecise pattern transfer in the multi-layer interconnect.
本文介绍了对Cu-CMP平坦性的仿真、模拟和实验研究,并着重分析了碟形、侵蚀和WIWUN与抛光液、线宽和图案密度、抛光速度和载荷等相关参数的关系。
Over the structure and process analysis to car-used ABS shell, using belleville spring to do four sides core-drawing to the products within the cylinder surface, the mold structure is simple and close, stable and reliable proved by production, the effect is remarkable, and it can be referenced by similar injection mold products.
通过对汽车ABS壳体的结构和工艺性分析,采用碟形弹簧,对产品进行圆周内四面抽芯,使模具结构简单紧凑,经生产验证,模具结构稳定可靠,效果显著,对类似产品的注射模有较好的参考价值。
Research and manufacture of pneumatic control disc spring safety valve;
气控碟形弹簧式安全阀的研制
The deign and machining of the key components of this shock absorber is introduced,including the surface treatment of the spline mandrel,the design of disc spring and connecting housing,and the configuration of sealing and bearing.
介绍了该空气机械减震器关键零部件的设计,包括花键心轴的表面处理技术、联接筒体设计、减震源碟形弹簧组合设计、密封及支承设计。
Based on the analysis of the pressing technology of disc springs, the CAD system method for the dies and moulds with disc springs was developed on the AutoCAD R14 platform by using Visual C+ +6.
在分析碟形弹簧冲压工艺的基础上 ,利用VisualC+ + 6。
A novel dresser of saucer superabrasives wheel is introduced,which is used for truing and dressing major diameter saucer wheel with poor rigidity by SiC cup wheel and diamond cup wheel.
通过以修整力为研究对象对修整器的系统工作稳定性进行了实验研究,得出该新形修整器的工作稳定性好,可以满足超硬磨料碟形砂轮的精密修整工艺要求。