PIC/MCC Simulation of Planar DC Magnetron Sputtering;
PIC/MCC模拟直流平面磁控溅射
Influence of Operation Conditions on Deposition Rate of Planar DC Magnetron Sputtering
工作参数对平面磁控溅射系统沉积速率的影响
The thickness uniformity of films deposited by planar magnetron sputtering target was analyzed theoretically.
从理论上分析了平面磁控溅射靶沉积薄膜的厚度均匀性。
Recently, various magnetron sputtering lines for depositing thin films on large-size glass substrates developed rapidly and attracted significant attention.
近年来，各种工业生产规模的玻璃基片大平面磁控溅射生产线发展迅速，令人关注。
The Fabrication of Plane Thin-film H_2S Gas Sensor with Sputtering Method;
利用磁控溅射仪制作平面薄膜型H_2S硅微传感器
Study on NiCoCrAlY Coating Using Unbalanced Magnetron Sputtering on Titanium Alloy Surface
钛合金表面非平衡磁控溅射沉积NiCoCrAlY涂层
Influence of operating parameters on discharge characteristics of planar DC magnetron
工作参数对平面直流磁控溅射放电特性的影响
Preparation of BN Films on Steels by Radio Frequency Magnetron Sputtering Method;
钢基表面射频磁控溅射法制备BN薄膜
Study of Magnetron Sputtring TiN Film Uesed on Nickel Intaglio Plate;
镍凹版表面磁控溅射TiN膜层性能研究
Study of MoS_2-Ti Composite Coatings Deposited by Unbalanced Magnetron Sputtering;
非平衡磁控溅射沉积MoS_2-Ti复合薄膜研究
Studies in the Technologies for the a-C:H Films Prepared by Middle Frequency Unbalanced Magnetron Sputtering;
中频非平衡磁控溅射制备DLC膜的工艺研究
Analysis of Structure of Cr-doped GLC Coatings Deposited by Unbalanced Magnetron Sputtering
非平衡磁控溅射掺Cr类石墨镀层的结构分析
Microstructures and Properties of Silicon Nitride Films Grown by Unbalanced Magnetron Sputtering
非平衡磁控溅射制备氮化硅薄膜及其性能研究
Influence of oxidation temperature on microstructure and properties of unbalanced magnetron sputtered TiN coatings
热氧化温度对非平衡磁控溅射TiN镀层的影响
Study on Deposition of C/SiC Films on Steel Substrate by Magnetron Sputtering;
钢基表面磁控溅射法C/SiC双层薄膜制备研究
VO_2 Thin Films Deposited by Reactive Magnetron Sputtering Method and Its Surface Performance Study;
反应磁控溅射制备VO_2薄膜及表面特征研究
Investigations on Heat Transfer and Anti-Fouling of Nanometer Surface Treated by Magnetron Sputtering in Pool Boiling System;
磁控溅射纳米表面池沸腾传热与防垢研究
Study on Properties of Magnetron Sputtering SiN Film on AZ31 Magnesium Alloys
AZ31镁合金表面磁控溅射SiN薄膜及其性能研究