There are many factors influencing the thin-film NiCr resistor s TCR(temperature coefficient of resistance),such as the vacuum degree during sputtering,sputtering rate,substrate temperature,film thickness and temperature and its holding time in heat-treatment.
影响NiCr薄膜电阻TCR的因素很多,我们分别从溅射淀积工艺和热处理工艺来研究和探讨NiCr薄膜电阻TCR与溅射时的真空度、溅射速率、基片温度、薄膜厚度及热处理温度和时间等因素的关系,从而为提高NiCr薄膜电阻的稳定性和降低其TCR值提供有益的条件。
The total transport model was established and the sputtering rate and compound fraction (θ\-t)of the target were obtained through the analysis of the particle generation, transport and surface reaction The models are expressed by the macro technology parameters and the construction parameters of the chamber,which is of important applied value to sputtering deposited technique of film material
从粒子的产生、输运及表面反应出发 ,建立总的输运模型并得到靶的溅射速率和化合物的复盖度。
Application of robotic system in sputtering coating system;
机器人系统在溅射镀膜设备中的应用
The combination of vacuum sputtering coating technology and chemical coating technology is launched to prepare electromagnetic shielding textiles,the principle of electromagnetic shielding is discussed.
试验表明,等离子体前处理、真空溅射镀膜、化学镀膜等多种技术的复合,能获得镀膜坚牢、宽频(1~18 GHz)和高效能(≥90 dB)的电磁屏蔽织物。
Design of sputtering vacuum machine based on the Atemga128
基于Atemga128的磁控溅射镀膜机(英文)
Computer Simulation of the Transportation and the Sputtering of Ions in RF Magnetron Sputtering;
射频磁控溅射镀膜过程中离子输运和溅射行为的模拟计算
Research on Film Thickness Uniformity of Sputtering Deposition on Planar Substrate
平板基片溅射镀膜的膜厚均匀性研究(英文)
Study for Bearing in Magnetron Sputtering Deposition Technology and Mechanical Behavior of the Material;
轴瓦磁控溅射镀膜技术及其材料力学性能研究
Study on Temperature Control System of High Vacuum Magnetron Sputtering Machine;
高真空磁控溅射镀膜机温度控制系统的研究
Research of the Vacuum Magnetron Sputtering Deposition Equipment and its Prdcess
真空磁控溅射镀膜设备及工艺技术研究
Effect of Coating by Ion Sputtering on Observation of Nanometer Materials Morphology
离子溅射镀膜对纳米材料形貌观察的影响
Research on the Film Quality and Particularity of Magnetic Sputtering Coating in Large Area Glass;
大面积玻璃基片磁控溅射镀膜膜层性质和特性的研究
Design of the Control System of Vacuum Magnetron Sputtering & Coating Equipment Based on Industrial Computer and PLC
基于工控机和PLC的真空磁控溅射镀膜设备控制系统设计
Deposition Rate Enhancement of Magnetron-Sputtered Al-N/Al Films Used in Solar Thermal Collector Tube
提高太阳能集热管磁控溅射镀膜沉积速率的研究
Study On Expert PID Temperature Control in High Vacuum Magnetron Sputtering Coating Machine
专家PID温度控制在高真空磁控溅射镀膜机中的应用研究
Elaboration of Nano-composite Coatings Using Sputtering Processes with Application to the Substitution of Electrolytic Cr Coating
磁控溅射纳米多层膜替代电镀铬涂层的研究
Properties of Mo films precursor of solar cells by magnetron sputtering
磁控溅射太阳能电池预镀Mo薄膜及其性能
KEYWORDS: GIMS, ion source, anode layer, sputtering, TiN, ion plating， medium frequency, pulsed DC.
中文关键词：气离溅射、子源、极层流、射、化钛、子镀膜、频、冲直流。
Preparation and Characterization of Vanadium Dioxide Thermochromic Coating Glass by Radio-Fraquency Magnetron Sputtering;
射频磁控溅射法制备VO_2热致变色镀膜玻璃及其表征
The enterprise deyang sunlight electric co., ltd. has special knowledge within the ranges Roasting, Thyristor and Vacuum coating as well as Sputtering.
公司专业从事晶闸管可控硅整流器、烤架以及真空镀膜和溅射业务。
High quality nickel films have been successfully plated on cenosphere particles by dc magnetron sputtering at mom temperature.
本文论述了在空心微珠表面磁控溅射镀金属薄膜的方法。
The Effects of Magnetron Sputtered Carbon Coating on Interface Properties of Composites;
炭纤维表面磁控溅射镀碳膜对复合材料界面性能的影响