The main problems are the low Etch Rate Selectivity causing Over etch on the top Oxide of Gate and the low Etch Rate Uniformit.
18微米技术侧壁(Spacer)工艺在栅极密集区域,栅极底部有斜坡的缺陷,指出了现有设备和工艺所遇到的一些问题,然后针对所面临的主要问题,即因为刻蚀速率选择比不够高而造成对栅极上方氧化膜的过刻蚀,同时,刻蚀速率均匀性偏低,造成中心区域Spacer形状过于倾斜,线宽过小的问题。
The quality study on excimer laser-induced electrochemical etching of silicon;
准分子激光电化学刻蚀硅的刻蚀质量研究
Chemically etching vapor-deposited diamond films by using hydrogen plasma under graphitization effect of iron;
氢等离子体在铁催石墨化作用下对CVD金刚石膜的刻蚀
Etching of a diamond film by oxygen plasma;
氧等离子体对金刚石膜的刻蚀研究
plasma sputter combined etching
等离子溅射复合刻蚀
SiO_2/Si dry etching with XeF_2
XeF_2对SiO_2/Si的干法刻蚀
Reserch on the Etching Selectivity of GaN/SiO_2
GaN/SiO_2刻蚀选择比的研究
Effects of Technical Parameters on Etching Rate and Selectivity of Si Deep Trench Using ICP Etching
硅深槽ICP刻蚀中刻蚀条件对形貌的影响
Study on Etch Selectivity Ratio of Masking Materials in Silicon Deep Etching
硅深刻蚀中掩蔽层材料刻蚀选择比的研究
etchings, woodcuts, lithographs;
蚀刻、木刻、平版画；
gas discharge etching
气体放电蚀刻[法]
laser engraving, laser etching
激光雕刻，激光蚀刻
a block that has been etched or engraved.
一块被蚀刻或雕刻的板。
To cut into the surface of(glass, for example) by the action of acid.
蚀刻用酸蚀刻（玻璃的）表面
Experimental Research on the Characteristics of the CrMo Steel by Etch Solution;
蚀刻液对CrMo钢蚀刻特性的实验研究
The corrosive action of acid upon an etcher's metal plate.
腐蚀蚀刻器的金属盘上的酸腐蚀
Etch a design on glass.
在玻璃上蚀刻一幅图案
I like these etchings, Kathy.
凯西，我喜欢这些蚀刻画。
UV metal-like etching printing ink
UV仿金属蚀刻油墨
automatic gravure etching machine
照相凹版自动蚀刻机
I know his etchings a little.
我知道一点他的蚀刻画。
photoresist controlled etch
光刻胶掩蔽控制腐蚀