Red GaInP/AlGaInP microsquare lasers with output waveguide are fabricated by standard photolithography and inductively coupled plasma(ICP) etching techniques.
利用普通光刻和感应耦合等离子体(ICP)刻蚀技术制作了红光GaInP/AlGaInP正方形微腔激光器,光功率电流曲线表明,器件实现了200 K的低温激射。
Using specially designed InGaAsP/InP multiple quantum well(MQW) structure,the damage effects of Cl2/H2 inductive coupled plasma(ICP) etching were investigated systematically,and the key processing parameters for low damage ICP etching have been optimized.
采用特别设计的InGaAsP/InP多量子阱结构(MQW),研究了Cl2/H2电感耦合等离子体(ICP)刻蚀损伤,优化了低损伤ICP刻蚀的关键工艺参数,得到了一种低损伤、形貌良好的Bragg光栅的制作方法。
Inductive Couple Plasmas Etching Processing of InSb Wafer
电感耦合等离子体刻蚀InSb芯片工艺的研究
Modeling and Simulation for Inductively Coupled Plasma Etching of Silicon in MEMS Fabrications;
MEMS加工中电感耦合等离子体（ICP）刻蚀硅片的模型与模拟
Investigation of Inductively Coupled Fluorocarbon Plasma and Etching of SiO_2;
碳氟感应耦合等离子体及其SiO_2介质刻蚀研究
Study of Inductively Coupled Plasma Etch of InP and Fabrication of 14xxnm Pump Laser Diodes;
感应耦合等离子体刻蚀InP研究与14xxnm泵浦激光器制作
Determination of Lead Isotope Ratio by Dual Gas Flow-Laser Ablation-Inductively Coupled Plasma-Mass Spectroemtry
双气流路-激光剥蚀电感耦合等离子体质谱测定铅同位素比值
Application of DSN/LA-ICP-MS in the Determination of Geological Samples
膜去溶/激光剥蚀电感耦合等离子体质谱在地质样品测定中的应用
Progress of Laser Ablation Inductively Coupled Plasma Mass Spectrometry and Its Application
激光烧蚀电感耦合等离子体质谱技术及其应用进展
Investigation on original statistic distribution analysis of flat-bulb steel by laser ablation inductively coupled plasma mass spectrometry
球扁钢的激光剥蚀-电感耦合等离子体质谱原位统计分布分析研究
inductively coupled plasma atomic emission spectrometry
电感耦合等离子体原子发射光谱法
Inductively coupled plasma reactive ion etching of InSb photovoltaic detector arrays
InSb阵列探测芯片的感应耦合等离子反应刻蚀研究
inductively coupled microwave plasma torch
电感耦合微波等离子体焰炬
inductively-coupled plasma spectrometer
电感耦合等离子体光谱仪
inductively coupled high frequency plasma torch
电感耦合高频等离子体焰炬
inductively coupled plasma quantometer
电感耦合等离子体光量计
inductively coupled plasma mass spectrometry
电感耦合等离子体质谱法
inductively coupled plasma emission spectrometry
电感耦合等离子体发射光谱学
inductively coupled plasma source mass spectrometer
电感耦合等离子体质谱仪
DRIFT IN ICP SYSTEM AND ITS CONTROL
电感耦合等离子体系统的漂移与监控