The operation principle of the ion source circuits in the Eaton NV10-80 high current implanter is described in detail, including ARC voltage, filament current, gas pressure regulation and vaporizer temperature control.
本文较为详细地分析了EatonNV10 - 80大束流离子注入机离子源电路工作原理 ,包括ARC电压、灯丝电流、气源压力调节及固体源坩埚温度控制的电路工作原理 ,同时 ,又针对常见离子源故障解决作了剖析。