A new kind of chemically amplified negative photoresist without crosslinking agent was studied using this co-polymer as the base resin, which was developable in harmless NaOH-.
本文引入单体MAGME合成了具有自交联作用的MAGME、苯乙烯和N ( 4 羟基苯基 )马来酰亚胺的共聚物 ,并以该聚合物为基体树脂 ,研制了一种新型的水显影化学增幅型负性抗蚀剂 ,并初步研究了其光刻工艺条件 。
Specification for photoresist/E-beam resist for hard surface photoplates
GB/T16527-1996硬面感光板中光致抗蚀剂和电子束抗蚀剂规范
Process Research of Novel Electron Beam Lithography Resist Calixarene Used in Nanofabrication
应用于纳米制造的新型电子束抗蚀剂Calixarene的工艺研究
Electron-beam lithography with a novel multilevel resist structure defines the pattern.
采用新型的多层抗蚀剂结构的电子束光刻来形成图形。
Study on Effect of Inhibitors on Localized Corrosion of Metal Using the Wire-Beam Electrode;
用丝束电极研究缓蚀剂对金属局部腐蚀的影响
Mechanism of corrosion resistance for alloys prepared by surface metallurgy with Cr and Ta ion beams
铬、钽离子束表面冶金合金的抗腐蚀机制
Wear and Corrosion Resistance of AZ31 Magnesium Alloy Modified by Ion Beams;
离子束改性AZ31镁合金耐磨抗蚀复合性能研究
Electrochemical Micromachining on Different Types of GaAs by Confined Etchant Layer Technique
不同类型GaAs上应用约束刻蚀剂层技术进行电化学微加工
The Measurement and Analysis of the Dosimetry of Total Skin Electron Irradiation
电子束全身皮肤照射剂量测定和分析
Dosimetric Characteristics of Electron Circular Applicators
电子束环形限光筒剂量学特性的测量
photoresist mask pattern
光致抗蚀剂掩模图形
organic resist stripper
有机抗蚀剂去除装置
fine featured resist
精细结构光刻用抗蚀剂
Determination of Inorganic Phosphor in the Anlistatig by Micelle Solubilization, spectrophotometry
胶束增溶分光光度法测定抗静电剂中无机磷
Measurement of dose distribution in radiation crosslinking of cable and wire by electron beam
电子束辐射交联电线电缆剂量分布的测量
Absolute determination of electron absorbed dose by an extrapolation chamber
用外推电离室绝对测定电子束吸收剂量
Practice for use of calorimetric dosimetry systems for electron beam dose measurements and dosimetry calibrations?
电子束剂量测量及剂量学校准用量热式剂量测量系统的使用方法
An image of the patterns on the mask is projected onto the resist-coated wafer, which is many centimeters away.
掩膜板上图形的像被投影到许多厘米以外的涂有抗蚀剂的片子上。
Synthesis of Non-surfactant with Fatty Acid Methyl Ester for Anti-corrosion in CO_2 and Inhibitory Performance;
高级脂肪酸甲酯合成非离子表面活性剂及其抗CO_2腐蚀性能研究