Describes the application of robstic system in magnetron sputtering coaters,as wellas the necessary conditions relevent to the appplication and control process.
现代工业的发展要求真空镀膜设备具有对复杂曲面零部件进行均匀镀膜的能力,要实现此类工件的镀膜要求,只有引进机器人技术才能达到。
Research on Intelligent CAD System for Vacuum Roll Coating Equipment;
卷绕真空镀膜设备智能CAD系统的研究