Since both the measuring range and the resolution of a traditional grating interferometer were difficult to be improved simultaneously, a grating interferometry based on a single long metrology grating was presented.
针对传统光栅干涉仪中测量范围和分辨率难以同时提高的问题,提出利用单根大长度、低线数光栅实现大量程、高分辨率位移测量的方法。
Through calibration,nano-repeatability error of grating interferometer mea.
提出了一种新型的激光衍射光栅干涉仪测量系统,以光栅衍射原理和偏振光学为理论基础,配合正交信号的解相位细分原理,使得该系统可以达到纳米级分辨率。
The principle and the method for producing concave gratings through incoherently illuminated grating interferometers are presented.
本文给出利用非相干照明光栅干涉仪制造凹面衍射光栅的基本原理和方法,并报告初步实验结果。
Study on double grating interferometer digital displacement measuring sensor;
双光栅干涉仪数字式位移传感器的研究
This grating interferometer uses grating as beam splitter, and behind the grating two beams interfere with each other.
本光栅干涉仪用光栅作为分束器,使双光束发生干涉。
Fabrication of Linear Diffraction Grating Interferometer System with High Accuracy;
高精度线性衍射光栅干涉仪系统的研制
The light is resolved by prisms, gratings, or by an interferometer.
光线用棱镜、光栅或干涉仪分解。
Application of Michelson Interferometer in Ultrasonic Grating
迈克尔逊干涉仪在超声光栅中的应用
Mach-Zehnder Interferometers Based on Double Gratings
基于双光栅的马赫-曾德尔干涉仪的初步研制
Investigation of Fiber Grating Fabry-Perot Interferometer Used for Weak Magnetic Field Detection;
用于弱磁场测量的光纤光栅法布里—珀罗干涉仪研究
Research of FBG Temperature Sensing Demodulation System Based on MZ Interferometer;
基于MZ干涉仪的光纤光栅温度传感解调系统的研究
laser image-speckle interferometer
激光影像-斑点干涉仪
multiple beam lateral-shear interferometer
多光束横向切变干涉仪
infrared prism interferometer-spectrometer
红外棱镜干涉光谱仪
three laser intercavity interferometer
三激光器内腔干涉仪
CO^2 laser interferometer
二氧化碳激光干涉仪
Research on Grating Moire Fringe Interferometry and Its Application
光栅莫尔条纹干涉计量及其应用研究
Low-coherence interferometric measurements of fiber bragg gratings dispersion
光纤布喇格光栅色散测量的低相干干涉方法
Research on Interferometric Fiber-Optic Bragg Grating Demodulation;
干涉法光纤光栅传感器解调技术的研究
Research on the Interference Nanosecond Laser Ablation of Micro-grating Structures on the Silicon Surface
硅表面微光栅结构的纳秒激光干涉刻蚀研究
Fiber grating sensor demodulation method based on polarization interference
基于偏振干涉的光纤光栅传感解调方法
Fiber grating wireless sensing network based on polarization interference
基于偏振干涉的光纤光栅无线传感网络系统