TiN film are made by means of multi-arc ion plating,hollow cathode ion-plating and ion beam assist multi-arc ion plating respectively for study its surface morphology and properties.
分别采用多弧镀、空心阴极离子镀及电子束强化多弧镀的方法在高速钢表面制备TiN薄膜,对其进行表面形貌及性能的研究。
hollow cathode ion coater
中空阴极离子镀膜机
Microstructure and Corrosion Resistance of Ti/TiN/Zr/ZrN Multilayer Film Deposited by Cathodic Ion Plating in Vacuum
真空阴极离子镀法制备Ti/TiN/Zr/ZrN多层膜
Multi-arc ion plating technique is using cool cathode with self-maintaining arc discharge as evaporation source.
多弧离子镀技术是一种在真空中将冷阴极自持弧光放电用于蒸发源的镀膜技术。
Surface morphology and properties of the hollow cathode ion-plating and multi-arc ion plated TiN film
空心阴极与多弧离子镀TiN薄膜的表面形貌及性能
Study on Macroparticles Reduction for Vacuum Cathodic Arc Source
真空阴极电弧离子镀层中宏观颗粒去除技术研究
Preparation of CrNx Film by Hot Cathode Ion Plating and Research on Oxidation Resistance
热阴极离子镀制备CrNx薄膜及抗氧化性能研究
Deposition Process in Cathodic Arc Ion Plating Through Computer Simulation;
阴极电弧离子镀沉积过程的计算机模拟研究
Corrosion behavior of ZrN gradient and Zr/ZrN multilayer coatings deposited by cathodic arc ion plating
阴极电弧离子镀ZrN梯度膜和Zr/ZrN多层膜的腐蚀特性
Preparation of the CrNx hard Coating by Hot Cathode Ion Plating Technology and Analysis of Its Properties
热阴极离子镀技术制备特种硬质薄膜及性能研究
hollow cathode aluminum ion laser
空心阴极铝离子激光器
KEYWORDS: GIMS, ion source, anode layer, sputtering, TiN, ion plating， medium frequency, pulsed DC.
中文关键词：气离溅射、子源、极层流、射、化钛、子镀膜、频、冲直流。
Plasma Diagnosis with Langmuir Probe in Plasma Enhanced Chemical Vapor Deposition
PECVD镀膜机等离子体静电探针诊断
The Study on the Metallic Bipolar Plates of Fuel Cell Modified by Films Deposited by AIP;
燃料电池金属双极板电弧离子镀薄膜改性研究
Modification of stainless steel bipolar plates for PEMFC with CrN_x films by AIP
PEMFC不锈钢双极板离子镀CrN_x薄膜表面改性
Plasma in Slit-Shaped Microhollow Cathode Sustained Discharge
狭缝型微空心阴极维持放电等离子体
The Application of Multi-arc Ion Plating Plasma Technology and Computer Control;
多弧离子镀等离子体镀膜技术应用及其计算机控制
A negatively charged ion, especially the ion that migrates to an anode in electrolysis.
阴离子带负电荷的离子，尤指在电解过程中游离到阳极的阴离子
Effects of cathode and anode protective devices on bipolar type ion-exchange membrane zero polar distance electrolyzer
阴阳极保护装置在复极离子膜零极距电解槽上的作用