Fabrication Process of Phase-Shifting Masks With Sub-resolution Patterns;
亚分辨图形相移掩模的制作方法
A tree like structure of the solutions have been found and some definitions such as tillering,sub-tillering, jointing arc put forward.
对单位分数和表1问题,将k=3,k=4,k=5的解结果加以分析并提出了分蘖、亚分蘖、拔节以及树结构的概念。