An enhanced,numerically stable transmittance matrix approach is developed and is applied to the implementation of the rigorous coupled-wave analysis and multilayer approximation for any shape profile gratings.
采用严格耦合波理论(RCWA)和多层近似法,详细的推导了任意面形介质光栅的衍射问题,得出了其矩阵求解方程,并采用增强透射矩阵法来避免直接求解带来的数值不稳定,提高了计算效率。