The relative motion law of the particles in slurry, with respect to the processed surface of the silicon, during the chemical mechanical planarization (CMP) of microelectronic materials is firstly discussed.
通过研究微电子材料化学机械平坦化(CMP)加工过程中磨料颗粒在晶片加工表面的运动规律,得到磨料颗粒在晶片表面的运动轨迹方程。
The deformation of materials and material removal mechanism during chemical mechanical palnarization (CMP) processing of microelectronic materials are numerically analyzed using finite element method.
采用有限元数值方法分析微电子材料化学机械平坦化(CMP)工艺过程中材料的变形和去除机理,得到作用在磨料颗粒上的力与名义压力、磨粒含量以及垫板几何和力学特性之间的关系,进而建立起一个材料去除率(MRR)模型。
A new type of functional polymer material,galloyl modified-cellulose(galloyl-1,6-hexyldiimino-oxypropyl-cellulose,CG),was synthesized with phenolic acid as functional group and modified cellulose as molecular skeleton.
以没食子酰基为功能基团,以改性纤维素为骨架合成功能高分子材料没食子酰化改性纤维素(没食子酰基-1,6-己二亚胺基-羟丙基-纤维素,CG):先将纤维素与环氧氯丙烷反应,然后依次接上己二胺桥链和三乙酰基没食子酰基,最后将没食子酰基脱去乙酰基得到目标产物。
A new functional polymer material, namely galloylcellulose, was synthesized with gallic acid as functional group, and cellulose as molecular skeleton.
研究了以没食子酰基为功能性基团、纤维素为分子骨架的功能高分子材料的合成。
The properties of electromagnetic functional polymer material, biomedical functional polymer material, chemical functional polymer material, photo functional polymer material and their application fields were introduced emphatically in this paper.
着重介绍了电磁功能高分子材料、生物医用功能高分子材料、化学功能高分子材料和光功能高分子材料的性质及应用领域。
Research & Development on Novel Shape-Memory Polymers;
新型形状记忆功能高分子材料的研制
State Key Laboratory of functional polymer materials for adsorption and separation
吸附分离功能高分子材料国家重点实验室
The research developments of gel electrolyte, a kind of new functional polymer materials are reviewed.
本文评述了凝胶电解质－种新型功能高分子材料的研究进展。
Thiophene polymers is one of the most intensively investigated functional polymers.
噻吩类聚合物是研究较为广泛的功能高分子材料。
Applications of Functional Polymer Material in Analysis of Environment and Biosensor
功能高分子材料在环境生物传感器中的应用研究
Preparation of Functional Polymer Nanomaterial and Its Catalytic Property Study;
功能高分子纳米材料的制备及其催化性能研究
Study on Functional Rare Earth Containing Polymer-Clay Composites;
含稀土的粘土高分子复合功能材料研究
Study on Technique for Continuous Preparation of Functionally Graded Polymer Materials;
功能梯度高分子材料连续制备技术的开发研究
Design and Control of New Type of Reactor for Macromolecule Bionics Function Materials;
新型高分子仿生功能材料反应器的设计与控制
Functional materials with molecular recognition ability can be obtained by blending or bonding calixarenes into the polymer materials.
将杯芳烃掺杂或键合于高分子材料中，可得到各种具有分子识别功能的高分子材料。
Photoelectric Polymer, High performance Polymer and Polymer Membranes.
高分子光电材料，高性能高分子材料，高分子薄膜材料，萤光材料及发光材料。
Photosensitive Functional Supramolecular Materials from Ionic Self-Assembly
离子自组装制备光敏功能超分子材料
Abstract: Polyphosphazenes are inorganic polymeric functional materialsthat have unique characterization.
文摘:聚磷腈是一类具有特殊性能的无机高分子功能材料。
The classifications,the preparation methods, the characterization techniques and the applications of polymer FGM were introduced.
介绍了高分子梯度功能材料的分类、制备技术、表征方法及应用。
Investigation on Ageing Resistance of Modified Polymer Materials with Nanosized Rutile Titanium Dioxide;
金红石型纳米TiO_2在高分子材料抗老化功能改性中的研究
Correlation between Rheological Behavior and Conductive Property of Carbon Black Filled Polymer Composites;
高分子/炭黑复合材料流变行为—导电功能的相关性研究
Influence of Sand-fixation Vegetation Multifunctional Macromolecule Composites at Physical Characters of Sand
固沙植被多功能高分子复合材料对沙土物理性状的影响
Study on Properties of Functional Materials Prepared by High Pressure DBD Plasmas;
高气压DBD等离子体合成功能材料及其性能研究