The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
从理论上阐述了微悬桥结构气体流速传感器的工作原理,设计了微悬桥的结构、工艺版图以及其电路系统。
Investegation of mechanical property of LPCVD silicon nitride film with micromachined bridge;
微机械悬桥法研究氮化硅薄膜力学性能