coarse grained metal

According to the special character of the metal geometry grating,this paper introduces a newplan to realize motive position measurement on the base of the phase demodulation division.

针对金属粗光栅波形质量差和节距大的缺点，提出了一种通过动态位置检测实现的鉴相细分方案，并完成了系统设计。